Nano-Imprinting Lithography (NIL) Equipments & Accessories 

 

Equipped with the latest technologies, EPT has successfully launched the new product line of nano-imprint lithography (NIL) equipment (EPT-4B00). We developed the advanced pressurized technology to ensure high quality printing of large area. The unique imprinting process with air-assisted soft press & auto mold release technology enables perfect imprinting on flexible or curved substrates and can better reduce the effect of small particle contamination on the substrates.

 

 

EPT also offers a wide range of nanoimprint materials and consumables , including

• UV curable resists

• Thermal resists

• Thermal/UV curable resists

• Surface treatment agents for mold release treatment

 

NIL Equipment: EPT-4B00 Automated All-round Nanoimprintor

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

EPT-4B00 is an easy-to-use, cost-effective and high quality nanoimprintor designed for R&D users in fields such as display, opto, biotechnology and energy. It fits versatile forms of nanoimprint including UV, thermal and the combination of UV and thermal.

 

The EPT-4B00 NIL system allows imprinting processes with molds and stamps at the substrate ranging from small chip size up to 4’’ in diameter. 

The system can be loaded with all customized process conditions based on suitable molds, resists and process parameters provided by EPT to save the time and reach the optimized goals of our customers.

 

 

 

Features:

• Automated imprint processes and user-friendly GUI software.

• Compatible with different types of nanoimprint: photo-curable, thermo-curable, UV/thermal hybdrid processes. 

• Si, Glass, Sapphire, Metal foils substrates can be used. 

• Accommodation of both soft and hard mold.

• Exquisite sample holder for different size and shape.

• Cost-effective tool for application in displays, biotechnology, energy, etc. 

 

Specifications:

• Equipment size:  800×880×1800 mm（L×W×H）

  • Size can be customized according to special request 

• Voltage: 220V (380V optional)

• Mold/Substrate size: Up to 4 inches

• Temperature: Up to 250 degree C  (300 degree option available)

• Vacuum capbility:  Down to 1 mTorr

• Contact pressure: 0.1-0.5 Mpa

• UV wavelength: standard 365±5 nm  (250-400nm option available)

• Intensity of UV irradation: Up to 400 mW/cm^2

  • Higher or lower UV intensity are available upon request